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DGIST Scholar

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Issue Date	Title Author(s) Journal	View
2019-07	Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO 2 /SiO 2 /Si films Min, Won Ja ; Marmitt, Gabriel ; Grande, Pedro L. ; Moon, DaeWon John Wiley & Sons Inc., 2019-07	373
2019-07	Determination of Dimension and Conformal Arsenic Doping Profile of a Fin Field Effect Transistors by Time-of-Flight Medium Energy Ion Scattering Min, Won Ja ; Kim, Jwasoon ; Park, Kyungsu ; Marmitt, Gabriel ; England, Jonathan ; Moon, DaeWon American Chemical Society, 2019-07	333

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